概要
HORIBA has used its gas analysis technology and cleaning process experience to develop a new gas concentration monitor. HORIBA has honed its knowledge over many years through the development and production of chemical solution concentration monitors such as those used for SC-1 and SC-2 monitors, mass flow controllers, and a variety of fluid supply systems. The gas concentration monitor completes HORIBA's process control lineup, making it possible for the company to offer total process solutions that meet all our customers needs.
特征
- Inline installation for real-time measurement.
- Compact space-saving design allowing for easy integration.
- Suitable for monitoring concentration in a variety of cleaning equipment, and drying processes.
規格
Type of gas measured | Please consult HORIBA | |
Measurement principle | Non-dispersive infrared method (NDIR method) | |
Measurement range*1 | 0 to 5% | |
Repeatability | ±2% F. S. | |
Gas cell optical path length | 5 mm | |
Response time | T90: 7 seconds or less | |
Gas cell pressure resistance | 1.0 MPa (G) | |
Sample gas flow rate*2 | 1 L/min | |
Sample gas temperature*2 | Room temperature | |
Sample gas pressure*2 | Atmospheric pressure | |
Wetted materials | SUS316L, sapphire, Ag | |
Leak rate | 5 x 10-12 Pa·m3/s | |
Piping junction | 1/4 inch VCR male | |
Analog output | DC 4 to 20 mA | |
Contact output | 3 alarm channels, | |
including ERR, High, and Low alarms | ||
Contact input | 1 channel for use in zero calibration | |
Display | 0.000 to 5.000% | |
Power supply | DC 24 V, 30 W (max.) | |
Installation environment temperature | 20 to 25°C | |
External dimensions | Sensor unit | 153.5 x 37.5 x 107 mm (6.0 x 1.5 x 4.2 in.) |
(W x D x H) | Control unit | 96 x 130 x 48 mm (3.8 x 5.1 x 1.9 in.) |
Mass | Sensor unit | About 1.0 kg, 2.2 lb |
Control unit | About 0.5 kg, 1.1 lb | |
